Mems Helmholtz Coils for Magnetic Resonance Spectroscopy
نویسندگان
چکیده
Miniature coils for use in magnetic resonance spectroscopy have been constructed in a rectangular Helmholtz arrangement based on a pair of substrates separated by spherical alignment spacers. An optimal geometry has been developed using simple theory and verified by numerical analysis. Prototype devices have been fabricated using silicon substrates shaped by anisotropic etching to form a sample trough and alignment features and carrying Cu/Au conductors fabricated by electroplating. Prototypes have good electrical performance.
منابع مشابه
MEMS Helmholtz coils for magnetic resonance imaging
Miniature coils for magnetic resonance imaging and spectroscopy are demonstrated. A rectangular Helmholtz arrangement based on a pair of substrates separated by spherical alignment spacers is investigated. An optimal geometry is developed using simple theory and verified by numerical analysis. Prototypes are fabricated using silicon substrates shaped by anisotropic etching to form a trough to h...
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